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Costacurta, Stefano and Malfatti, Luca and Patelli, Alessandro and Falcaro, Paolo and Amenitsch, Heinz and Marmiroli, Benedetta and Grenci, Gianluca and Piccinini, Massimo and Innocenzi, Plinio (2010) Deep X-ray lithography for direct patterning of PECVD films. Plasma Processes and Polymers, Vol. 7 (6), p. 459-465. eISSN 1612-8869. Article.

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