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Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography

Faustini, Marco and Marmiroli, Benedetta and Malfatti, Luca and Louis, Benjamin and Krins, Natacha and Falcaro, Paolo and Grenci, Gianluca and Laberty Robert, Christel and Amenitsch, Heinz and Innocenzi, Plinio and Grosso, David (2011) Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography. Journal of Materials Chemistry, Vol. 21 (11), p. 3597-3603. eISSN 1364-5501. Article.

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DOI: 10.1039/C0JM03493B

Abstract

Nano-in-micro-patterned heterogeneous substrates and Pt electrodes are prepared via organic/inorganic self-assembly combined with deep X-ray lithography. Nanoperforated titania membranes are obtained through dip coating from a sol–gel solution using block copolymer micelles as templating agent. Such thin films are selectively exposed to the X-ray radiation that leads to the structural local densification and permits the selective etching of the unexposed layer. Structural as well as electrochemical characterizations demonstrate that the final materials are micrometric features of a sub-10 nm thick perforated titania membrane that guarantees the accessibility to the substrate. This system was also applied to a conductive platinum-coated silicon surface to achieve micrometric features of nanoelectrode arrays. This scalable strategy of combining bottom-up and top-down approaches is thereby promising for various applications involving smart functional devices.

Item Type:Article
ID Code:6592
Status:Published
Refereed:Yes
Uncontrolled Keywords:Nanoperforated titania membranes, Pt electrodes, X-ray lithography
Subjects:Area 09 - Ingegneria industriale e dell'informazione > ING-IND/22 Scienza e tecnologia dei materiali
Divisions:001 Università di Sassari > 01 Dipartimenti > Architettura e pianificazione
Publisher:Royal Society of Chemistry
eISSN:1364-5501
Deposited On:18 Nov 2011 13:35

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