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Densification of sol-gel silica thin films induced by hard X-rays generated by synchrotron radiation

Innocenzi, Plinio and Malfatti, Luca and Kidchob, Tongjit and Costacurta, Stefano and Falcaro, Paolo and Marmiroli, Benedetta and Cacho-Nerin, Fernando and Amenitsch, Heinz (2011) Densification of sol-gel silica thin films induced by hard X-rays generated by synchrotron radiation. Journal of Synchrotron Radiation, Vol. 18 (2), p. 280-286. eISSN 1600-5775. Article.

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DOI: 10.1107/S0909049510051666


In this article the effects induced by exposure of sol-gel thin films to hard X-rays have been studied. Thin films of silica and hybrid organic-inorganic silica have been prepared via dip-coating and the materials were exposed immediately after preparation to an intense source of light of several keV generated by a synchrotron source. The samples were exposed to increasing doses and the effects of the radiation have been evaluated by Fourier transform infrared spectroscopy, spectroscopic ellipsometry and atomic force microscopy. The X-ray beam induces a significant densification on the silica films without producing any degradation such as cracks, flaws or delamination at the interface. The densification is accompanied by a decrease in thickness and an increase in refractive index both in the pure silica and in the hybrid films. The effect on the hybrid material is to induce densification through reaction of silanol groups but also removal of the organic groups, which are covalently bonded to silicon via Si-C bonds. At the highest exposure dose the removal of the organic groups is complete and the film becomes pure silica. Hard X-rays can be used as an efficient and direct writing tool to pattern coating layers of different types of compositions.

Item Type:Article
ID Code:6590
Uncontrolled Keywords:Sol-gel, deep X-ray lithography, thin films
Subjects:Area 09 - Ingegneria industriale e dell'informazione > ING-IND/22 Scienza e tecnologia dei materiali
Divisions:001 Università di Sassari > 01 Dipartimenti > Architettura e pianificazione
Publisher:Blackwell / Wiley
Deposited On:18 Nov 2011 11:28

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