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Chemical tailoring of hybrid sol−gel thick coatings as hosting matrix for functional patterned microstructures

Falcaro, Paolo and Costacurta, Stefano and Malfatti, Luca and Buso, Dario and Patelli, Alessandro and Schiavuta, Piero and Piccinini, Massimo and Grenci, Gianluca and Marmiroli, Benedetta and Amenitsch, Heinz and Innocenzi, Plinio (2011) Chemical tailoring of hybrid sol−gel thick coatings as hosting matrix for functional patterned microstructures. ACS Applied Materials and Interfaces, Vol. 3 (2), p. 245-251. eISSN 1944-8252. Article.

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DOI: 10.1021/am100901m


A phenyl-based hybrid organic − inorganic coating has been synthesized and processed by hard X-ray lithography. The overall lithography process is performed in a two-step process only (X-rays exposure and chemical etching). The patterns present high aspect ratio, sharp edges, and high homogeneity. The coating has been doped with a variety of polycyclic aromatic hydrocarbon functional molecules, such as anthracene, pentacene, and fullerene. For the first time, hard X-rays have been combined with thick hybrid functional coatings, using the sol−gel thick film directly as resist. A new technique based on a new material combined with hard X-rays is now available to fabricate optical devices. The effect due to the high-energy photon exposure has been investigated using FT-IR and Raman spectroscopy, laser scanner, optical profilometer, and confocal and electron microscope. High-quality thick hybrid fullerene-doped microstructures have been fabricated.

Item Type:Article
ID Code:5779
Uncontrolled Keywords:Sol−gel films, hybrid materials, lithography, fullerenes, acene
Subjects:Area 09 - Ingegneria industriale e dell'informazione > ING-IND/22 Scienza e tecnologia dei materiali
Divisions:002 Altri enti e centri di ricerca del Nord Sardegna > Porto Conte Ricerche, Alghero
001 Università di Sassari > 01 Dipartimenti > Architettura e pianificazione > LMNT-Laboratorio di Scienza dei Materiali e NanoTecnologie
Publisher:American Chemical Society
Deposited On:10 May 2011 17:29

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