Falcaro, Paolo and Costacurta, Stefano and Malfatti, Luca and Buso, Dario and Patelli, Alessandro and Schiavuta, Piero and Piccinini, Massimo and Grenci, Gianluca and Marmiroli, Benedetta and Amenitsch, Heinz and Innocenzi, Plinio (2011) Chemical tailoring of hybrid sol−gel thick coatings as hosting matrix for functional patterned microstructures. ACS Applied Materials and Interfaces, Vol. 3 (2), p. 245-251. eISSN 1944-8252. Article.
Full text not available from this repository.
A phenyl-based hybrid organic − inorganic coating has been synthesized and processed by hard X-ray lithography. The overall lithography process is performed in a two-step process only (X-rays exposure and chemical etching). The patterns present high aspect ratio, sharp edges, and high homogeneity. The coating has been doped with a variety of polycyclic aromatic hydrocarbon functional molecules, such as anthracene, pentacene, and fullerene. For the first time, hard X-rays have been combined with thick hybrid functional coatings, using the sol−gel thick film directly as resist. A new technique based on a new material combined with hard X-rays is now available to fabricate optical devices. The effect due to the high-energy photon exposure has been investigated using FT-IR and Raman spectroscopy, laser scanner, optical profilometer, and confocal and electron microscope. High-quality thick hybrid fullerene-doped microstructures have been fabricated.
I documenti depositati in UnissResearch sono protetti dalle leggi che regolano il diritto d'autore
Repository Staff Only: item control page